On the 1st, it was learned from China Electronics Engineering Design Institute Co., Ltd. (hereinafter referred to as "China Electronics Institute"), a subsidiary of China National Investment Corporation, that the world's first nanoscale micro vibration laboratory has been officially put into operation in Xiong'an New Area, Hebei Province. This is a national level scientific and technological innovation platform developed by China National Investment Corporation in the field of advanced electronic manufacturing. The nanoscale micro vibration laboratory will comprehensively serve key fields such as semiconductor manufacturing, aerospace, precision instruments, and biomedicine, promoting the coordinated improvement of China's high-precision manufacturing 'soft power' and 'hard equipment'. ”Yang Guangming, Chief Technology Officer of China Electronics Academy, introduced that the core device of the laboratory is the world's largest and most accurate micro vibration simulation experimental platform independently developed by China. It is reported that the experimental platform has a plane size of 4 meters by 4 meters, a self weight of about 50 tons, a designed bearing capacity of up to 20 tons, and a vibration accuracy exceeding the nanometer level. The minimum vibration amplitude is much lower than the Earth's own pulsation, which can fully meet the requirements of large-scale semiconductor equipment and satellite full-scale load testing. The experimental platform adopts the air spring active vibration isolation system independently developed by China Electronics Academy, which can efficiently isolate the environmental vibration interference of the foundation and building structure, and construct an ultra pure micro vibration environment on the platform. The experimental bench is equipped with high-precision linear motor actuators, which can achieve precise acceleration output of 0.001 to 5 gal in a wide frequency range. It can accurately simulate extremely weak background environmental vibrations and comprehensively cover the full frequency band and amplitude range of core applications such as electronic information and aerospace. At the same time, the experimental platform has rich waveform simulation capabilities such as sine waves, random waves, and sweep waves, which can achieve precise simulation in one direction and synchronous simulation in three directions. It can not only conduct precise analysis of specific frequencies, but also restore random vibration scenes with multiple degrees of freedom coupling in complex real environments, providing highly realistic and flexible experimental conditions for scientific research and equipment verification. The establishment and operation of the nanoscale micro vibration laboratory has opened up experimental verification bottlenecks in multiple strategic industries in China. ”Yang Guangming said that the laboratory has filled the technical and market gaps in multiple aspects of micro vibration testing methods, precision equipment vibration tolerance standards, and isolation device evaluation systems in China, providing key foundational support for independent research and development of high-end equipment in the fields of electronic processes, aerospace information, and more. (New Society)